MEMS VOA’s Handling Precautions

MEMS VOA’s Handling Precautions

MEMS VOA’s Handling Precautions

MEMS is three-layer structure which is the upper electrode layer and the lower electrode through the insulating layer. The MEMS mirror is mounted on the upper layer supported by rotation axis. (fig.1-b)
When Voltage is applied to MEMS, electrostatic attraction force is generated, and then the mirror is inclined as the degrees of the potential difference which is made between the upper and lower electrode. MEMS VOA’s mechanism is that the amount of attenuation of the optic axis is obtained by inclination of the mirror.
Once higher voltage at the limit of which the mirror contacts with the support board is applied to MEMS, the mirror is rarely inclined even if electric charge is removed. This is mirror stiction, and it is caused by electrostatic discharge (ESD). Please handle the products at ESD protected area (EPA), and don’t apply excessive voltage.