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Spatial Light Modulator

Our reflective LCOS (liquid crystal on silicon) is an advanced spatial light modulator for full high resolution applications. The Full-high definition (Full-HD) resolution, 10-bit (1024 gray levels) and excellent phase stability (~0.003π rad.) make ultra-fine light modulation possible for various applications.

SLM Product Line-Up

Model No. Features
SLM-300 High-Power LCOS Spatial Light Modulator
SLM-250 UV Hardened Spatial Light Modulator
SLM-200 Full HD Reflective Spatial Light Modulator

High-Power LCOS Spatial Light Modulator

SLM-300

SLM-300

 

Our spatial light modulator (SLM) is based on reflective liquid crystal on silicon (LCOS) micro-display technology. The SLM-300 high-power model holds the world record for high-power durability up to CW 200 Watts. The SLM-300 has 100 times higher power durability when compared with Santec’s conventional SLM product, the SLM-200.

【Features】
  • High Power-durable LCOS based SLM
  • High Phase Resolution 10-bit (1024) Gray Level
  • Ultra Low Phase Noise ~0.003πrad.(Typ.)

【Application】
  • Laser processing
  • 3D printing
  • IC trimming

SLM-300 Specifications

Item min max Units Notes
Operating Wavelength Range 532 , 800 , 1064 nm  
Panel Size (H) 15.36 x (V) 9.60 mm Active area
Pixel Resolution (H) 1920 x (V) 1200 pixel  
Pixel Size / Pitch 7.8 / 8.0 μm  
Panel Reflectivity Typ. >80 % Depending on specied wavelength range
Aperture Ratio 95 %  
Gray Level 10 (1024) bit  
Frame Rate 60 or 120 Hz Factory default setting
LCOS Drive Frequency 1200 Hz  
Phase Depth - rad.  
Phase Stability Typ. < 0.003π rad.  
Response Time Typ. 200 ms  
Interface DVI* / USB 3.0 - *10-bit using RGB 8-bit, 3 colors
Operating Temperature Range 15 35 degC No condensation 
Storage Temperature 0 40 degC  No condensation 
Optical Power Handling - 200 1) W/cm² CW @1064 nm
Dimensions 122 x 122 x 38.3 mm  
Control software GUI software and SDK for Windows -  
Water Flow 1 - 2 L/min 15 - 25 degC
Water Inlet and Outlet Pipe fittings - Rc(PT) 3/8 inch female 2)

1) The value is not guaranteed. Please refer Santec SLM technical sheet for judgement of useable light power.
2) Supports NPT standard using attached conversion adapters.

Wavelength option

Wavelength option

Introduction Video

UV Hardened Spatial Light Modulator

SLM-250

UV hardend Spatial Light Modulator SLM-250

Reflective LCOS (Phase only)

We have introduced an ultraviolet (UV) hardened spatial light modulator (SLM) based on Liquid Crystal on Silicon (LCOS) technology. This product supports WUXGA (1920×1200) and Full-HD (1920×1080) video resolutions. The 2nd generation SLMs from Santec offer 4 times better gray scale resolution and 10 times better phase stability when compared with conventional products in the market and the 1st gen Santec SLMs.

The UV model SLM (SLM-250) has a 42 times higher UV tolerance compared to the visible to Infra-Red (IR) wavelength SLM-200. A power density up to 10mW/cm2 is sustainable using a novel liquid crystal and dielectric mirror design.
The SLM-250 follows the popular first generation SLM-100 from Santec that has been deployed in various industrial and scientific applications, including beam shaping, computer-generated holograms, optical manipulation, and wave-front compensation.

【Application】
  • Laser processing
  • Biology sensing
  • 3D printing
  • IC triming
Figure 1 SLM-250, Lifetime test as a function of optical power handling.
Figure 1 SLM-250, Lifetime test as a function of optical power handling.

SLM-250 Specifications

Item min max Units Notes
Wavelength Range 365 550 nm  
AR Coating Range 365 550 nm  
AR Coating Reflectance 0.7 % Angle of incidence = 0 degree
Panel Size (H) 15.36 x (V) 9.60 mm Active area
Pixel Resolution (H) 1920 x (V) 1200 pixel  
Pixel Size / Pitch 7.8 / 8.0 μm  
Panel Reflectivity Typ. > 70 %  
Aperture Ratio 95 %  
Gray Level 10 (1024) bit  
Frame Rate 60 or 120 Hz Factory default setting
LCOS Drive Frequency 1200 Hz  
Phase Depth rad.  
Phase Stability Typ. < 0.003π rad.  
Response Time Typ. 50 ms  
Interface D-DVI* / USB 3.0 *10-bit using RGB 8-bit, 3 colors
Operating Temperature Range 15 35 degC No condensation 
Storage Temperature 0 40 degC No condensation 
Optical Power Handling 1) Typ. 40 MW/cm² Peak power @355 nm, Pulse laser, pulse width 260 psec, repetition rate 100 Hz
10.0 mW/cm² @365 nm, 24 H/day continuous operation
Dimensions 122 x 122 x 38.3 mm  
Control Software GUI software and SDK for Windows  

1)The value is not guaranteed. Please refer Santec SLM technical sheet for judgement of useable light power.

Full HD Reflective Spatial Light Modulator

SLM-200

SLM-200

Our reflective LCOS (liquid crystal on silicon) is an advanced spatial light modulator for full high resolution applications. The Full-high definition (Full-HD) resolution, 10-bit (1024 gray levels) and excellent phase stability (~0.001π rad.) make ultra-fine light modulation possible for various applications.

■User-friendly DVI interface

■操作が容易なGUI付属

■High Resolution: 10-bit (1024 gray levels)

■高解像度

■Ultra-low Phase Noise: ~0.002π rad.

■高安定度

■Super Flatness Available: λ/40 @633 nm

The flatness of the LCOS can be corrected to λ/40 with the accompanying lookup table.

■高安定度

Specifications

Item min max Units Notes
Operating Wavelength Range 450 1600 nm (Refer to appended table about AR coating option)
Panel Size (H) 15.36 x (V) 9.60 mm Active area
Pixel Resolution (H) 1920 x (V) 1200 pixel  
Pixel Size / Pitch 7.8 / 8.0 μm  
Panel Reflectivity Typ. > 80 %  Depending on specified wavelength range
Aperture Ratio 95 %  
Gray Level 10 (1024) bit  
Frame Rate 60 or 120 Hz Factory default setting
LCOS Drive Frequency 1200 Hz  
Phase Depth rad.  
Phase Stability Typ. < 0.001π rad.  
Response Time Typ. 300 ms  
Interface DVI*/ USB 3.0 *10-bit using RGB 8-bit, 3 colors
Operating Temperature Range 15 35 degC No condensation 
Storage Temperature 0 40 degC No condensation 
Optical Power Handling  Typ. 10 1) W/cm² @1550 nm, CW, 2.0 mm beam diameter
Dimensions 117.6 x 117.6 x 33.7 mm  
Control Software GUI software and SDK for Windows  

1) The value is not guaranteed. Please refer Santec SLM technical sheet for judgement of useable light power.




AR Coating Option

Item Parameter Units
Ordering Code Number -01 -02 -03 -04 -12 -14
AR Coating Range 450-550 750-850 1000-1100 1500-1600 400-700 450-550 / 1500-1600 nm
AR Coating Reflectance 2) < 0.5 < 1.5 < 0.6 %

2) Angle of incidence = 0 degree

■LASER Processing and High Power Resistance

Below are examples for the high power resistance. We can do simulation with other conditions.

■レーザー加工 / ハイパワー耐性

■Wavefront Correction

Flatness up to "lambda/40” can be achieved using a Michelson Interferometer with Shack-Hartmann sensor.

■波面補正

■Hologram

SLM-200 can be used for holography, made easier with our exclusive GUI.

■ホログラフィ

■Optical Vortex

SLM-200 can be used to generate optical vortex and be utilized for optical tweezer and SDN (Space Division Multiplexing) applications.

■光渦

Beam steering
Wavefront correction
Pulse/Beam shaping
Diffractive optics
Optical tweezer
・Laser Processing Machine (※)
We are developing a Laser Processing Machine incorporating a SLM with Professor Yamamoto and Associate Professor Taira, faculty members at the Institute for Molecular Science.
Associate Professor Taira has developed the high power compact microchip laser, which is suitable for laser processing with one shot method.
The technique is constantly refined, adapting emerging technologies and techniques to provide higher efficiencies and quality.

有機薄膜加工例
<Advantages and Disadvantages of Different Laser Processing Methods>
レーザー加工の方式別メリットとデメリット

SLM-200を用いたレーザー加工機の社内デモを実施しております。 実際に加工したいサンプルを持参いただければテスト加工することができます。 加工サンプルに対する対応可否を検討しますので事前に営業担当までお問合せください。

■レーザー加工

サンプル持込みによるテスト加工
加工条件等、技術者サポートあり

■利用条件等

利用日  : 平日(※日程は営業担当者に問い合わせください。)
利用時間: 10時~17時

レーザー加工
Parameter Unit Specification Notes

Laser power

W/mm2

5.5

 

Laser type

固体レーザー(532nm)

他に488nmあり

Process area

mm

5 x 5

対物レンズ倍率:X2

0.5 x 0.5

対物レンズ倍率:X20

Resolution

µm

200

対物レンズ倍率:X2

20

対物レンズ倍率X20

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